JPH0543491Y2 - - Google Patents

Info

Publication number
JPH0543491Y2
JPH0543491Y2 JP1987166455U JP16645587U JPH0543491Y2 JP H0543491 Y2 JPH0543491 Y2 JP H0543491Y2 JP 1987166455 U JP1987166455 U JP 1987166455U JP 16645587 U JP16645587 U JP 16645587U JP H0543491 Y2 JPH0543491 Y2 JP H0543491Y2
Authority
JP
Japan
Prior art keywords
substrate
pair
squeegee
squeegees
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987166455U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0171469U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987166455U priority Critical patent/JPH0543491Y2/ja
Publication of JPH0171469U publication Critical patent/JPH0171469U/ja
Application granted granted Critical
Publication of JPH0543491Y2 publication Critical patent/JPH0543491Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Manufacturing Of Printed Circuit Boards (AREA)
  • Drying Of Semiconductors (AREA)
JP1987166455U 1987-10-30 1987-10-30 Expired - Lifetime JPH0543491Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987166455U JPH0543491Y2 (en]) 1987-10-30 1987-10-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987166455U JPH0543491Y2 (en]) 1987-10-30 1987-10-30

Publications (2)

Publication Number Publication Date
JPH0171469U JPH0171469U (en]) 1989-05-12
JPH0543491Y2 true JPH0543491Y2 (en]) 1993-11-02

Family

ID=31453851

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987166455U Expired - Lifetime JPH0543491Y2 (en]) 1987-10-30 1987-10-30

Country Status (1)

Country Link
JP (1) JPH0543491Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5301120B2 (ja) * 2007-07-03 2013-09-25 東京応化工業株式会社 洗浄装置、洗浄方法、予備吐出装置、及び塗布装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0238463Y2 (en]) * 1985-12-25 1990-10-17

Also Published As

Publication number Publication date
JPH0171469U (en]) 1989-05-12

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